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Carl Zeiss SMT AG develops lithographic, semiconductor metrology, laser and synchrotron optics, electron beam, and nano imprint technologies for clients across the nano manufacturing and testing equipment markets. The firm, established as a Carl Zeiss Photo Division unit in 1960, is known for its ZEISS Cross-Beam (R), ZEISS AIMS (TM), Starlith (R), and MeRIT (TM) products. ZEISS Cross-Beam systems employ electron- and ion-beam technologies in performing 3D analyses on chip structures. The products detect flaws in real time. The Aerial Image Measuring Systems (AIMS) fab (R) products support the detection of printing defects. The systems also offer users the MeRIT mask repair tool. Carl Zeiss SMT offers clients across the life sciences sector scanning electron microscopes (SEMs), field emission scanning electron microscopes (FE-SEMs), and energy filtering transmission electron microscopes (TEMs). The company was established as a separate division in 1989 and spun off as a wholly owned subsidiary of Carl Zeiss in 2003. The company has formed alliances with ASML, SII Nanotechnology, Cymer, and NaWoTec GmbH. Carl Zeiss SMT is based in Oberkochen, Germany. It maintains additional offices in Europe and the United States.
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