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Company

Carl Zeiss SMT AG Products   
Carl Zeiss Str 22
Oberkochen,  GE  73447
Germany
Telephone: (49 ) 7364 20-0
Fax: (49) 7364 20-6808
URL: http://www.smt.zeiss.com
Email: info@smt.zeiss.com

Carl Zeiss SMT AG develops lithographic, semiconductor metrology, laser and synchrotron optics, electron beam, and nano imprint technologies for clients across the nano manufacturing and testing equipment markets. The firm, established as a Carl Zeiss Photo Division unit in 1960, is known for its ZEISS Cross-Beam (R), ZEISS AIMS (TM), Starlith (R), and MeRIT (TM) products. ZEISS Cross-Beam systems employ electron- and ion-beam technologies in performing 3D analyses on chip structures. The products detect flaws in real time. The Aerial Image Measuring Systems (AIMS) fab (R) products support the detection of printing defects. The systems also offer users the MeRIT mask repair tool. Carl Zeiss SMT offers clients across the life sciences sector scanning electron microscopes (SEMs), field emission scanning electron microscopes (FE-SEMs), and energy filtering transmission electron microscopes (TEMs). The company was established as a separate division in 1989 and spun off as a wholly owned subsidiary of Carl Zeiss in 2003. The company has formed alliances with ASML, SII Nanotechnology, Cymer, and NaWoTec GmbH. Carl Zeiss SMT is based in Oberkochen, Germany. It maintains additional offices in Europe and the United States.

Parent Company: Carl Zeiss
Org. Type: Corporation Equity Type: Private
Company Status: Active

Products:
ApoTome
Axiovert 200
AxioVision Inside4D
AxioVision
Carl Zeiss SMT AG--Company News
Carl Zeiss SMT AG--Company Reference
LSM 510 META
LSM 510
SIRF (Simple Internal Reflection Fluorescence)

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